Diffusion Vacuum Pumps
RANGU are a series of diffusion vacuum pumps. They have been specially designed for industrial high vacuum applications. These include glass coating units, vacuum furnaces, metal coatings, physical vapor deposition (PVD), surface treatments or thin film coating.
RANGU diffusion vacuum pumps work according to the proven vapor steam principle. And are characterized by their outstanding reliability even under harsh conditions.
The basic component of RANGU diffusion vacuum pumps is a cylindrical pump unit with a heatable bottom. Oil is used as a fluid and is heated up. The vapor from this oil rises into the nozzle system. It then passes through several vapor steam stages and out of this system under high pressure.
The molecules in the process gas are caught by these vapor steams and carried downwards, towards the outlet of the backing pump. The oil vapor condenses on the inner surface of the water-cooled pump unit and is directed back to the bottom.